产品适用于 Si、SiC、GaAs、InP、GaN、蓝宝石(Sapphire)、玻璃(Glass)、金属(Metal)等多种材料,覆盖1 次研磨、2 次研磨、最终研磨(精密研磨)三个阶段。
CIEGAL 研磨垫产品详细参数与特征
|
CIEGAL 型号 |
适用材料(application) |
1 次研磨 |
2 次研磨 |
最终研磨 |
产品特征(feature) |
厚度(Thickness) |
硬度(Hardness) |
毛长(Nap length) |
开口径(Pore size) |
|
7355-000FE |
Si CMP、SiC、Ge、Glass |
|
|
〇 |
仕上げ研磨标准(final polishing standard) |
1.49mm |
58° |
530μm |
65μm |
|
7355-000ZCM |
Si、CMP |
|
|
〇 |
开口径小、短毛(small pore, short nap) |
1.30mm |
61° |
400μm |
45μm |
|
PS8000 |
Si、GaAs、InP、CMP |
|
|
〇 |
高通用性(high versatility) |
1.50mm |
55° |
530μm |
70μm |
|
PS8410-VFB2 |
GaAs、InP |
|
|
〇 |
开口径小、长毛(small pore, long nap) |
1.85mm |
56° |
700μm |
45μm |
|
183 (183EX) |
Si、Crystal、Metal、Sapphire |
|
〇 |
|
高硬度、高研磨力(high hardness, high rate) |
1.37mm |
70° |
500μm |
80μm |
|
193 (193EX) |
Si、GaAs、SiC |
|
〇 |
〇 |
安定研磨能力(stable polishing ability) |
1.45mm |
58° |
500μm |
80μm |
|
PS1200 |
Glass |
|
|
〇 |
表面柔软、酒红色(soft surface, wine color) |
0.80mm |
58° |
500μm |
50μm |
|
7355-000FE-SL0.8t |
Glass |
|
|
〇 |
薄型标准(thin standard) |
0.80mm |
58° |
530μm |
65μm |
|
XA-5 |
Si、Glass |
|
|
〇 |
表面柔软、白色绒面(soft surface, white suede) |
1.45mm |
55° |
530μm |
40μm |
|
MP210 |
Metal |
|
〇 |
〇 |
薄型薄膜基材绒面(thin film-based suede) |
0.64mm |
79° |
400μm |
80μm |
|
PV6600 |
Lt、Ln、Metal、Sapphire |
〇 |
〇 |
|
2 次研磨标准(2nd polishing standard) |
1.13mm |
78° |
— |
— |
|
PV2800 |
Si、GaAs、Sapphire |
〇 |
〇 |
|
高硬度(high hardness) |
1.35mm |
85° |
— |
— |
|
PV2900 |
Si、Sapphire |
〇 |
〇 |
|
最高硬度(highest hardness) |
1.35mm |
90° |
— |
— |
|
U-3500SPN |
Glass |
〇 |
|
|
含铈(contains cerium) |
1.50mm |
80° |
— |
— |
|
U-3500PN |
Glass、Crystal |
〇 |
|
|
含铈、开口径小(contains cerium, small pore) |
1.50mm |
90° |
— |
— |
|
U-2500 |
SiC、Sapphire、GaN |
〇 |
|
|
无铈、开口径小(cerium free, small pore) |
1.50mm |
90° |
— |
— |

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